Wafer-based light source parameter control
US-10036960-B2 · Jul 31, 2018 · US
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Lalovic Ivan patents
Lalovic Ivan is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Lalovic Ivan |
| Total patents | 4 |
| First publication | Mar 12, 2015 |
| Latest publication | Jul 31, 2018 |
Notable patents
Publications ranked by popularity score, then publication date.
Wafer-based light source parameter control
US-2018011409-A1 · Jan 11, 2018 · US
Wafer-based light source parameter control
US-9715180-B2 · Jul 25, 2017 · US
Wafer-based light source parameter control
US-2015070673-A1 · Mar 12, 2015 · US
Recent patents
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Cymer LLC | 4 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70041 | 4 |
| G03F7/70358 | 4 |