Wafer-based light source parameter control

Patent metadata

Field	Value
Publication number	US-10036960-B2
Application number	US-201715627518-A
Country	US
Kind code	B2
Filing date	Jun 20, 2017
Priority date	Jun 11, 2013
Publication date	Jul 31, 2018
Grant date	Jul 31, 2018

Abstract

A photolithography method includes instructing an optical source to produce a pulsed light beam; scanning the pulsed light beam across a wafer of a lithography exposure apparatus to expose the wafer with the pulsed light beam; during scanning of the pulsed light beam across the wafer, receiving a characteristic of the pulsed light beam at the wafer; receiving a determined value of a physical property of a wafer for a particular pulsed light beam characteristic; and based on the pulsed light beam characteristic that is received during scanning and the received determined value of the physical property, modifying a performance parameter of the pulsed light beam during scanning across the wafer.

First claim

What is claimed is:

1. A photolithography method comprising:
producing a pulsed light beam;
scanning the pulsed light beam across a wafer of a lithography exposure apparatus to expose the wafer with the pulsed light beam;
detecting a property of the pulsed light beam at the wafer as the pulsed light beam is scanned across the wafer;
during scanning of the pulsed light beam across the wafer, receiving the property of the pulsed light beam at the wafer;
determining a wafer physical property at a wafer area that correlates with the received pulsed light beam property, wherein the wafer physical property at the wafer area is one or more of:
a contrast of a feature formed on the wafer,
a critical dimension at a wafer area exposed to the pulsed light beam,
a photoresist profile at a wafer area exposed to the pulsed light beam,
an overlay between layers formed on the wafer, and
a side-wall angle at a wafer area exposed to the pulsed light beam;

determining a modification to a spectral feature of the pulsed light beam based on the pulsed light beam property that is received during scanning and the determined wafer physical property; and
modifying the spectral feature of the pulsed light beam during scanning across the wafer based on the determined modification.

2. The method of claim 1 , wherein determining the wafer physical property at the wafer area comprises selecting the value of the wafer physical property based on the received pulsed light beam property.

3. The method of claim 1 , wherein producing the pulsed light beam comprises perturbing a spectral shape of the pulsed light beam on a pulse-to-pulse basis.

4. The method of claim 3 , wherein perturbing the spectral shape of the pulsed light beam on a pulse-to-pulse basis comprises shifting a central wavelength of each pulse of the light beam from a baseline wavelength in a predefined repeating pattern.

5. The method of claim 4 , wherein modifying the spectral feature of the pulsed light beam comprises modifying how much the central wavelength of each pulse of the light beam is shifted from the baseline wavelength.

6. The method of claim 1 , wherein modifying the spectral feature of the pulsed light beam comprises modifying a target spectral feature of the pulsed light beam.

7. The method of claim 6 , further comprising:
receiving a measurement of the spectral feature of the pulsed light beam;
determining whether the measured spectral feature matches the modified target spectral feature; and
if it is determined that the measured spectral feature does not match the modified target spectral feature, sending a signal to an optical source that produces the pulsed light beam to thereby modify the spectral feature of the pulsed light beam.

8. The method of claim 1 , wherein determining the wafer physical property at the wafer area that correlates with the received pulsed light beam property comprises receiving a set of determined values of the wafer physical property for a wafer that has been previously exposed by the light beam for a set of light beam properties on the previously-exposed wafer.

9. The method of claim 1 , wherein receiving the light beam property at the wafer comprises:
receiving a control signal from the lithography exposure apparatus; and
determining the light beam property at the wafer based on the received control signal.

10. The method of claim 1 , wherein determining the modification to the spectral feature of the pulsed light beam comprises:
accessing a stored set of spectral features as a function of light beam properties at the wafer;
selecting the value for the spectral feature within the accessed set that corresponds to the received property of the light beam at the wafer; and
comparing the selected value of the spectral feature with a current value of the spectral feature.

11. The method of claim 1 , further comprising correcting errors in patterning at the wafer based on modifying the spectral feature of the pulsed light beam.

12. The method of claim 11 , wherein the errors in the wafer patterning are corrected without modifying the lithography exposure apparatus.

13. The method of claim 12 , wherein the errors in the wafer patterning are corrected without modifying optical features or components within the lithography exposure apparatus.

14. A photolithography system comprising:
an optical source that produces a pulsed light beam;
a set of optical components that direct the pulsed light beam to a wafer of a photolithography exposure apparatus to thereby expose the wafer with the pulsed light beam;
a scanning optical system within the photolithography exposure apparatus configured to scan the pulsed light beam across the wafer;
a monitoring module within the photolithography exposure apparatus that detects a property of the pulsed light beam at the wafer as the pulsed light beam is scanned across the wafer, and outputs the property of the pulsed light beam; and
a control system connected to the monitoring module and to the optical source, the control system being configured to:
receive, from the monitoring module, the detected property of the pulsed light beam at the wafer as the pulsed light beam is scanned across the wafer;
determine a wafer physical property at a wafer area, wherein the wafer physical property is one or more of a contrast of a feature formed on the wafer, a critical dimension of a wafer area exposed to the pulsed light beam, a photoresist profile at a wafer area exposed to the pulsed light beam, an overlay between layers formed on the wafer, and a side-wall angle at a wafer area exposed to the pulsed light beam; and
determine a modification to a spectral feature of the pulsed light beam based on the pulsed light beam property that is output from the monitoring module and on the determined wafer physical property; and

an optical source module connected to the performance parameter module to receive the determined modification for the spectral feature and connected to an optical source actuation system that actuates one or more physical features of the optical source to modify one or more spectral features of the pulsed light beam based on the received determined modification for the spectral feature.

15. The system of claim 14 , wherein the control system is configured to determine the wafer physical property at the wafer area by selecting the value of the wafer physical property of the wafer area based on the received pulsed light beam property.

16. The system of claim 14 , further comprising a metrology module that includes a detection system that measures the wafer physical property at the wafer area for each light beam property at the wafer and outputs the measured wafer physical property for each light beam property at the wafer.

17. The system of claim 14 , wherein the metrology module is integrated within the photolithography exposure apparatus so that the detection system measures the wafer physical property of the wafer in real time and during exposure of the current wafer mounted to a wafer holder of the metrology module.

18. A photolithography method comprising:
producing a pulsed light beam;
scanning the pulsed light beam across a wafer of a lithography exposure apparatus to expose the wafer with the pulsed light beam;
during scanning of the pulsed light beam across the wafer, receiving a property of the pulsed light beam at the wafer;
determining a wafer physical property at a wafer area, wherein the wafer physical property at the wafer area is one or more of:
a contrast of a feature formed on the wafer,
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Assignees

• Cymer LLC

Inventors

• Lalovic Ivan
• Zurita Omar
• Rechtsteiner Gregory Allen
• Alagna Paolo
• Hsieh Simon
• Lee Jason J
• Rokitski Rostislav
• Jiang Rui

Classifications

• G03F7/70041

  by pulsed sources, e.g. multiplexing, pulse duration, interval control or intensity control · CPC title

• G03F7/70358 Primary

  Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging · CPC title