System having a lithography apparatus and a number of electronics modules, and method for operating a system
US-2025370351-A1 · Dec 4, 2025 · US
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Krone Stefan patents
Krone Stefan is listed as an inventor on 19 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Krone Stefan |
| Total patents | 19 |
| First publication | Nov 3, 2016 |
| Latest publication | Dec 4, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Apparatus and method for providing sensor data of an optical system, optical system and lithography apparatus having an optical system
US-2025164893-A1 · May 22, 2025 · US
Method, optical system, test device and arrangement
US-2024302453-A1 · Sep 12, 2024 · US
Optical system, test device, lithography apparatus, arrangement and method
US-2024302754-A1 · Sep 12, 2024 · US
Optical system, lithography apparatus and method
US-2024288777-A1 · Aug 29, 2024 · US
Optical system, lithography apparatus and method
US-2024280916-A1 · Aug 22, 2024 · US
Actuator-sensor device and lithography apparatus
US-2024027914-A1 · Jan 25, 2024 · US
Control device for actuating an actuator unit of a lithography system, lithography system having a control device, and method for operating the control device
US-10983443-B2 · Apr 20, 2021 · US
Component for a projection exposure apparatus
US-10866528-B2 · Dec 15, 2020 · US
Component for a projection exposure apparatus
US-2019324372-A1 · Oct 24, 2019 · US
Recent patents
Latest publications not already listed above.
Sensor assembly and method for determining respective positions of a number of mirrors of a lithography system
US-10444633-B2 · Oct 15, 2019 · US
Sensor assembly and method for determining respective positions of a number of mirrors of a lithography system
US-10437155-B2 · Oct 8, 2019 · US
Control device for actuating an actuator unit of a lithography system, lithography system having a control device, and method for operating the control device
US-2019302626-A1 · Oct 3, 2019 · US
Device and method for controlling positioning of multiple adjustable mirror elements in a multi-mirror arrangement
US-10018803-B2 · Jul 10, 2018 · US
Sensor assembly and method for determining respective positions of a number of mirrors of a lithography system
US-2018067399-A1 · Mar 8, 2018 · US
Sensor assembly and method for determining respective positions of a number of mirrors of a lithography system
US-2018067400-A1 · Mar 8, 2018 · US
Method for displacing at least one optical component
US-9851554-B2 · Dec 26, 2017 · US
Device and method for controlling positioning of multiple adjustable mirror elements in a multi-mirror arrangement
US-2017038555-A1 · Feb 9, 2017 · US
Method for displacing at least one optical component
US-2016320608-A1 · Nov 3, 2016 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 19 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70075 | 11 |
| G03F7/7085 | 8 |
| G03F7/70891 | 8 |
| G03F7/70825 | 7 |
| G03F7/70116 | 7 |