Control device for actuating an actuator unit of a lithography system, lithography system having a control device, and method for operating the control device

Patent metadata

Field	Value
Publication number	US-10983443-B2
Application number	US-201916447622-A
Country	US
Kind code	B2
Filing date	Jun 20, 2019
Priority date	Dec 22, 2016
Publication date	Apr 20, 2021
Grant date	Apr 20, 2021

Abstract

A control device actuates actuator unit to set a position of an optical element of a lithography system. The control device includes an amplifier unit for providing a control signal for the actuator unit via a voltage signal and a PWM signal. The PWM signal has a duty factor and a clock frequency. The control device also includes a modulator unit designed to provide the PWM signal having the duty factor and a defined clock frequency from a plurality of defined clock frequencies. A defined clock frequency of the plurality of defined clock frequencies is an integer multiple of a basic clock frequency. The basic clock frequency is in the range of 10 kHz to 1 MHz.

First claim

What is claimed is:

1. A control device, comprising:
a modulator unit configured to provide a PWM signal having a duty ratio and a defined clock frequency from a plurality of defined clock frequencies; and
an amplifier unit configured to provide a control signal to an actuator unit via a voltage signal and the PWM signal,
wherein:
the defined clock frequency is an integer multiple of a basic clock frequency;
the basic clock frequency is in the range of 10 kHz to 1 MHz; and
the amplifier unit is configured to provide, without interruption, the control signal to the actuator unit:
i) in a first time interval via a first PWM signal having a first defined clock frequency from the plurality of defined clock frequencies; and
ii) in a second time interval, directly following the first time interval, via a second PWM signal having a second defined clock frequency from the plurality of defined clock frequencies, the second defined clock frequency being different from the first defined clock frequency.

2. The control device of claim 1 , wherein the control device is configured to actuate the actuator unit to set a position of an optical element of a lithography apparatus.

3. The control device of claim 1 , wherein the modulator unit is configured to:
i) depending on a position to be set of an optical element whose position is settable via the actuator unit, provide the PWM signal having a current duty ratio; and
ii) depending on the current duty ratio, select the defined clock frequency of the PWM signal from the plurality of defined clock frequencies.

4. The control device of claim 1 , further comprising an assignment unit configured to assign a defined clock frequency from the plurality of defined clock frequencies to each duty ratio that is settable for the PWM signal.

5. The control device of claim 4 , wherein the modulator unit is configured, depending on the position to be set of the optical element, to determine a defined duty ratio, to determine the defined clock frequency assigned to the determined duty ratio in the assignment unit, and to provide the PWM signal having the determined duty ratio and the determined defined clock frequency.

6. The control device of claim 1 , further comprising an assignment unit configured to:
i) subdivide duty ratios that are settable for the PWM signal into a plurality of intervals; and
ii) assign a defined clock frequency from the plurality of defined clock frequencies to each interval.

7. The control device of claim 6 , wherein the modulator unit is configured, depending on the position to be set of the optical element, to determine a defined duty ratio, to determine the defined clock frequency assigned to the determined duty ratio in the assignment unit, and to provide the PWM signal having the determined duty ratio and the determined defined clock frequency.

8. The control device of claim 1 , wherein:
the control device is configured so that factors n 1 , n 2 , . . . , nk generate different clock frequencies f 1 , f 2 , . . . , fk;
fk=f 0 ·nk form an uninterrupted sequence of natural numbers; and
n 1 =1.

9. The control device of claim 1 , wherein the basic clock frequency is a clock frequency derived from a system clock frequency.

10. The control device of claim 1 , wherein a defined clock frequency is assigned to a respective duty ratio depending on a power loss, a current signal and/or a voltage signal of the control device.

11. The control device of claim 10 , wherein a defined clock frequency is assigned to a respective duty ratio depending on a system parameter of a lithography apparatus in which the actuator unit is to be used to set a position of an optical unit.

12. The control device of claim 1 , wherein a defined clock frequency is assigned to a respective duty ratio depending on a system parameter of a lithography apparatus in which the actuator unit is to be used to set a position of an optical unit.

13. The control device of claim 1 , wherein each defined clock frequency of the plurality of defined clock frequencies is defined depending on at least one system parameter.

14. The control device of claim 1 , wherein:
a power loss of the amplifier unit for each duty ratio is less than 60% of a maximum power loss of the amplifier unit for a clock frequency that is high in comparison with the basic clock frequency; and
an amplitude of a superposed AC current in a supply line to the amplifier unit and an amplitude of a superposed AC voltage at an output of the amplifier unit for each duty ratio is in each case less than 25% of a maxi-mum amplitude of the superposed AC current and the superposed AC voltage for the basic clock frequency.

15. The control device of claim 1 , wherein the control device is a switching amplifier.

16. An apparatus, comprising:
an optical element;
an actuator unit; and
a control device configured to actuate the actuator unit to set a position of the optical element, the control device comprising:
a modulator unit configured to provide a PWM signal having a duty ratio and a defined clock frequency from a plurality of defined clock frequencies; and
an amplifier unit configured to provide a control signal to the actuator unit via a voltage signal and the PWM signal,

wherein:
the defined clock frequency is an integer multiple of a basic clock frequency, the basic clock frequency is in the range of 10 kHz to 1 MHz;
the amplifier unit is configured to provide, without interruption, the control signal to the actuator unit:
i) in a first time interval via a first PWM signal having a first defined clock frequency from the plurality of defined clock frequencies; and
ii) in a second time interval, directly following the first time interval, via a second PWM signal having a second defined clock frequency from the plurality of defined clock frequencies, the second defined clock frequency being different from the first defined clock frequency; and

the apparatus comprises a lithography apparatus.

17. The apparatus of claim 14 , wherein the apparatus comprises an EUV lithography apparatus.

18. The apparatus of claim 17 , wherein the optical element comprises a mirror.

19. A method for operating a control device of a lithography apparatus comprising an optical element whose position is settable via an actuator unit, the lithography apparatus further comprising a control device for actuating the actuator unit, the method comprising:
determining a duty ratio of a PWM signal depending on a position of the optical element which is to be set;
determining a defined clock frequency from a plurality of defined clock frequencies depending on the determined duty ratio, a respective defined clock frequency of the plurality of defined clock frequencies being an integer multiple of a basic clock frequency, the basic clock frequency being in the range of 10 kHz to 1 MHz;
providing the PWM signal having the determined duty ratio and the determined clock frequency; and
amplifying the PWM signal with the voltage signal for providing the control signal for setting the position of the optical element.

20. The apparatus of claim 16 , wherein the modulator unit is configured to:
i) depending on a position to be set of an optical element whose position is settable via the actuator unit, provide the PWM signal having a current duty ratio; and
ii) depending on the current duty ratio, select the defined clock frequency of the PWM signal from the plurality of defined clock frequencies.

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Krone Stefan
• Berger Lars
• Kiesel Ralf
• Wijlaars Paul

Classifications

• H03K7/08

  Duration or width modulation {; Duty cycle modulation} · CPC title

• G03F7/70758

  Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving · CPC title

• G03F7/70258 Primary

  Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system · CPC title

• G02B7/1828

  using magnetic means · CPC title

• H03K3/017

  Adjustment of width or dutycycle of pulses (pulse width modulation H03K7/08 {; to maintain energy constant H03K3/015}) · CPC title