Electrostatic chuck and processing apparatus
US-11955360-B2 · Apr 9, 2024 · US
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Kitada Hiroho patents
Kitada Hiroho is listed as an inventor on 6 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Kitada Hiroho |
| Total patents | 6 |
| First publication | Jul 30, 2015 |
| Latest publication | Apr 9, 2024 |
Notable patents
Publications ranked by popularity score, then publication date.
Electrostatic chuck and processing apparatus
US-2023154780-A1 · May 18, 2023 · US
Plasma processing apparatus
US-11482435-B2 · Oct 25, 2022 · US
Plasma processing apparatus
US-2019393058-A1 · Dec 26, 2019 · US
Plasma processing apparatus and plasma processing method
US-2016027618-A1 · Jan 28, 2016 · US
Plasma processing apparatus
US-2015214083-A1 · Jul 30, 2015 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Hitachi High Tech Corp | 6 |
| Tocalo Co Ltd | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/32715 | 3 |
| H10P72/0602 | 3 |
| H01J37/32192 | 3 |
| H01J37/32935 | 3 |
| G01J5/0875 | 3 |