Resist pattern forming method, coating and developing apparatus and storage medium
US-10459339-B2 · Oct 29, 2019 · US
Kimura Yoshio is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Kimura Yoshio |
| Total patents | 4 |
| First publication | Mar 24, 2016 |
| Latest publication | Oct 29, 2019 |
Publications ranked by popularity score, then publication date.
US-10459339-B2 · Oct 29, 2019 · US
US-10351811-B2 · Jul 16, 2019 · US
US-2016355773-A1 · Dec 8, 2016 · US
US-2016085154-A1 · Mar 24, 2016 · US
Latest publications not already listed above.
No data yet.
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Tokyo Electron Ltd | 3 |
| Sinfonia Tech Co Lt | 1 |
| Sinfonia Technology Co Ltd | 1 |
Most common classification codes across this inventor's patents.