Advanced process control methods for process-aware dimension targeting
US-9966315-B2 · May 8, 2018 · US
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Jaschinsky Philipp patents
Jaschinsky Philipp is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Jaschinsky Philipp |
| Total patents | 4 |
| First publication | May 18, 2017 |
| Latest publication | May 8, 2018 |
Notable patents
Publications ranked by popularity score, then publication date.
Advanced process control methods for process-aware dimension targeting
US-2018012813-A1 · Jan 11, 2018 · US
Methods, apparatus, and systems for minimizing defectivity in top-coat-free lithography and improving reticle CD uniformity
US-9798244-B2 · Oct 24, 2017 · US
Methods, apparatus, and systems for minimizing defectivity in top-coat-free lithography and improving reticle cd uniformity
US-2017139330-A1 · May 18, 2017 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Globalfoundries Inc | 4 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F1/70 | 4 |
| H10P74/203 | 2 |
| H10P76/2041 | 2 |
| H10P50/691 | 2 |
| H10P50/642 | 2 |