Thin-film ultra-high frequency diagnostic device for plasma diagnosis and plasma diagnostic module comprising same
US-2026066246-A1 · Mar 5, 2026 · US
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Hur Min patents
Hur Min is listed as an inventor on 8 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Hur Min |
| Total patents | 8 |
| First publication | Oct 29, 2015 |
| Latest publication | Mar 5, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Integrated control system and automated transportation system including the same
US-2023159270-A1 · May 25, 2023 · US
Plasma cleaning apparatus and semiconductor process equipment with the same
US-11643722-B2 · May 9, 2023 · US
Plasma cleaning apparatus and semiconductor process equipment with the same
US-2021198786-A1 · Jul 1, 2021 · US
Plasma reactor for abatement of hazardous material
US-9472381-B2 · Oct 18, 2016 · US
Plasma reactor for abating hazardous material
US-9211500-B2 · Dec 15, 2015 · US
Plasma reactor for abatement of hazardous material
US-2015314233-A1 · Nov 5, 2015 · US
Plasma reactor for abating hazardous material
US-2015306540-A1 · Oct 29, 2015 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Korea Mach & Materials Inst | 4 |
| Korea Inst Mach & Materials | 3 |
| Sk On Co Ltd | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| Y02C20/30 | 6 |
| H01J37/32834 | 4 |
| H01J37/32844 | 4 |
| B01D2259/818 | 4 |
| H01J37/32 | 3 |