Systems and methods for determining a fluid height and/or a fluid velocity on a spinning substrate
US-2024421009-A1 · Dec 19, 2024 · US
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Hetzer David patents
Hetzer David is listed as an inventor on 5 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Hetzer David |
| Total patents | 5 |
| First publication | Mar 10, 2015 |
| Latest publication | Dec 19, 2024 |
Notable patents
Publications ranked by popularity score, then publication date.
High-precision dispense system with meniscus control
US-10354872-B2 · Jul 16, 2019 · US
High-Precision Dispense System With Meniscus Control
US-2018047563-A1 · Feb 15, 2018 · US
EUV resist sensitivity reduction
US-9086631-B2 · Jul 21, 2015 · US
Track processing to remove organic films in directed self-assembly chemo-epitaxy applications
US-8975009-B2 · Mar 10, 2015 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Tokyo Electron Ltd | 5 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P74/203 | 3 |
| H10P72/0604 | 2 |
| H10P72/0448 | 2 |
| H10P72/0404 | 2 |
| H10P72/0402 | 2 |