Method of implanting an implant species into a substrate at different depths
US-11640908-B2 · May 2, 2023 · US
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Heller Marcel patents
Heller Marcel is listed as an inventor on 10 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Heller Marcel |
| Total patents | 10 |
| First publication | May 12, 2015 |
| Latest publication | May 2, 2023 |
Notable patents
Publications ranked by popularity score, then publication date.
Method of Implanting an Implant Species into a Substrate at Different Depths
US-2020373163-A1 · Nov 26, 2020 · US
Method for processing a carrier, a carrier, an electronic device and a lithographic mask
US-10241391-B2 · Mar 26, 2019 · US
Methods for manufacturing semiconductor devices
US-9837280-B2 · Dec 5, 2017 · US
A method for processing a carrier, a carrier, an electronic device and a lithographic mask
US-2017178909-A1 · Jun 22, 2017 · US
Method for processing a carrier, a carrier, an electronic device and a lithographic mask
US-9613812-B2 · Apr 4, 2017 · US
Methods for Manufacturing Semiconductor Devices
US-2016343577-A1 · Nov 24, 2016 · US
Method for manufacturing a semiconductor device
US-9437440-B2 · Sep 6, 2016 · US
Method for processing a carrier, a carrier, an electronic device and a lithographic mask
US-2015287599-A1 · Oct 8, 2015 · US
Method for processing a carrier, a carrier, an electronic device and a lithographic mask
US-9029049-B2 · May 12, 2015 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Infineon Technologies Ag | 7 |
| Infineon Technologies Dresden Gmbh | 3 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P30/222 | 7 |
| H10P30/204 | 7 |
| H10P30/22 | 7 |
| H10D30/603 | 7 |
| H01L21/266 | 7 |