Capacitive sensing data integration for plasma chamber condition monitoring
US-12537179-B2 · Jan 27, 2026 · US
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Hardy Charles R patents
Hardy Charles R is listed as an inventor on 5 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Hardy Charles R |
| Total patents | 5 |
| First publication | Sep 9, 2021 |
| Latest publication | Jan 27, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Capacitive sensing data integration for plasma chamber condition monitoring
US-2023343568-A2 · Oct 26, 2023 · US
Capacitive sensing data integration for plasma chamber condition monitoring
US-2023103165-A1 · Mar 30, 2023 · US
Capacitive sensing data integration for plasma chamber condition monitoring
US-11545346-B2 · Jan 3, 2023 · US
Capacitive sensing data integration for plasma chamber condition monitoring
US-2021280400-A1 · Sep 9, 2021 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 5 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J2237/24592 | 5 |
| H01J2237/24564 | 5 |
| H01J2237/24495 | 5 |
| H01J37/32926 | 5 |
| H01J37/32853 | 5 |