Metal contamination prevention method and apparatus, and substrate processing method using the same and apparatus therefor
US-11486043-B2 · Nov 1, 2022 · US
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Harada Katsushige patents
Harada Katsushige is listed as an inventor on 8 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Harada Katsushige |
| Total patents | 8 |
| First publication | Oct 1, 2015 |
| Latest publication | Nov 1, 2022 |
Notable patents
Publications ranked by popularity score, then publication date.
Metal Contamination Prevention Method and Apparatus, and Substrate Processing Method Using the Same and Apparatus Therefor
US-2020040463-A1 · Feb 6, 2020 · US
Method and apparatus for forming thin film
US-9574269-B2 · Feb 21, 2017 · US
Method and apparatus for forming thin film
US-2016281224-A1 · Sep 29, 2016 · US
Film forming method and film forming apparatus
US-9293543-B2 · Mar 22, 2016 · US
Method and apparatus of forming metal compound film, and electronic product
US-9234275-B2 · Jan 12, 2016 · US
Method for fabricating semiconductor device and the semiconductor device
US-9230799-B2 · Jan 5, 2016 · US
METHOD AND APPARATUS FOR FORMING TiSiN FILM
US-2015279683-A1 · Oct 1, 2015 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Tokyo Electron Ltd | 8 |
| Univ Osaka | 1 |
| Teramoto Akinobu | 1 |
| Kambayashi Hiroshi | 1 |
| Ueda Hirokazu | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P14/6339 | 3 |
| H10D64/691 | 3 |
| H01L21/0228 | 3 |
| H01L29/517 | 3 |
| C23C16/46 | 3 |