Measurement apparatus for measuring a wavefront aberration of an imaging optical system
US-11441970-B2 · Sep 13, 2022 · US
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Haidner Helmut patents
Haidner Helmut is listed as an inventor on 9 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Haidner Helmut |
| Total patents | 9 |
| First publication | Jan 8, 2015 |
| Latest publication | Sep 13, 2022 |
Notable patents
Publications ranked by popularity score, then publication date.
Measurement apparatus for measuring a wavefront aberration of an imaging optical system
US-2020003655-A1 · Jan 2, 2020 · US
Projection exposure apparatus and method for measuring an imaging aberration
US-10324380-B2 · Jun 18, 2019 · US
Projection exposure apparatus and method for measuring an imaging aberration
US-2018196350-A1 · Jul 12, 2018 · US
Apparatus for determining an optical property of an optical imaging system
US-10006807-B2 · Jun 26, 2018 · US
Measuring system for measuring an imaging quality of an EUV lens
US-9494483-B2 · Nov 15, 2016 · US
Measuring system
US-9482968-B2 · Nov 1, 2016 · US
Apparatus for determining an optical property of an optical imaging system
US-2016202118-A1 · Jul 14, 2016 · US
Measuring System for Measuring an Imaging Quality of an EUV Lens
US-2015009492-A1 · Jan 8, 2015 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 9 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/706 | 9 |
| G03F7/70133 | 6 |
| G03F7/7085 | 5 |
| G01M11/0271 | 4 |
| G01M11/005 | 4 |