Insert for a source chamber of an EUV radiation source
US-12292690-B2 · May 6, 2025 · US
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Hagg Michael patents
Hagg Michael is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Hagg Michael |
| Total patents | 4 |
| First publication | Dec 9, 2021 |
| Latest publication | May 6, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Insert for a source chamber of an euv radiation source
US-2023019744-A1 · Jan 19, 2023 · US
EUV radiation source, insert for an EUV radiation source and insert for an insert for an EUV radiation source
US-11550225-B2 · Jan 10, 2023 · US
Euv radiation source, insert for an euv radiation source and insert for an insert for an euv radiation source
US-2021382395-A1 · Dec 9, 2021 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 4 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70033 | 4 |
| H05G2/001 | 4 |
| H05G2/0092 | 2 |
| H05H1/00 | 2 |
| H05G2/003 | 2 |