Method for determining an imaging quality of an optical system when illuminated by illumination light within an entrance pupil to be measured
US-12492963-B2 · Dec 9, 2025 · US
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Gwosch Klaus patents
Gwosch Klaus is listed as an inventor on 25 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Gwosch Klaus |
| Total patents | 25 |
| First publication | Sep 13, 2018 |
| Latest publication | Dec 9, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Method for simulating illumination and imaging properties of an optical production system when an object is illuminated and imaged by means of an optical measurement system
US-2025334886-A1 · Oct 30, 2025 · US
Method for qualifying a defect structure on an object utilizable in projection lithography
US-2025314602-A1 · Oct 9, 2025 · US
Method for measuring a reflectivity of an object for measurement light and metrology system for carrying out the method
US-12422743-B2 · Sep 23, 2025 · US
Method for determining an imaging quality of an optical system when illuminated by illumination light within a pupil to be measured
US-12372431-B2 · Jul 29, 2025 · US
Method for simulating illumination and imaging properties of an optical production system when illuminating and imaging an object by means of an optical measurement system
US-2024402613-A1 · Dec 5, 2024 · US
Method for reproducing a target wavefront of an imaging optical production system, and metrology system for carrying out the method
US-12158703-B2 · Dec 3, 2024 · US
Method for simulating illumination and imaging properties of an optical production system during the illumination and imaging of an object by means of an optical measurement system
US-2024361704-A1 · Oct 31, 2024 · US
Optical apparatus, method for setting a target deformation, and lithography system
US-2024103381-A1 · Mar 28, 2024 · US
Optical device, method for adjusting a setpoint deformation and lithography system
US-2024085783-A1 · Mar 14, 2024 · US
Recent patents
Latest publications not already listed above.
Metrology system for examining objects with EUV measurement light
US-11796926-B2 · Oct 24, 2023 · US
Metrology system for examining objects with euv measurement light
US-2023168593-A1 · Jun 1, 2023 · US
Method for reproducing a target wavefront of an imaging optical production system, and metrology system for carrying out the method
US-2023130187-A1 · Apr 27, 2023 · US
Method for determining an imaging quality of an optical system when illuminated by illumination light within a pupil to be measured
US-2022390320-A1 · Dec 8, 2022 · US
Method for determining an imaging quality of an optical system when illuminated by illumination light within an entrance pupil to be measured
US-2022381643-A1 · Dec 1, 2022 · US
Method for measuring a reflectivity of an object for measurement light and metrology system for carrying out the method
US-2022236648-A1 · Jul 28, 2022 · US
Method of and apparatus for spatially measuring nano-scale structures
US-11255791-B2 · Feb 22, 2022 · US
Method of high spatial resolution determining a position of a singularized molecule which is excitable for emission of luminescence light
US-10962479-B2 · Mar 30, 2021 · US
Method of high spatial resolution determining a position of a singularized molecule which is excitable for emission of luminescence light
US-10908089-B2 · Feb 2, 2021 · US
Method of high spatial resolution determining a position of a singularized molecule which is excitable for emission of luminescence light
US-10900901-B2 · Jan 26, 2021 · US
Method of and apparatus for spatially measuring nano-scale structures
US-10794829-B2 · Oct 6, 2020 · US
Method of High Spatial Resolution Determining a Position of a Singularized Molecule Which is Excitable for Emission of Luminescence Light
US-2019234882-A1 · Aug 1, 2019 · US
Method of High Spatial Resolution Determining a Position of a Singularized Molecule Which is Excitable for Emission of Luminescence Light
US-2019234879-A1 · Aug 1, 2019 · US
Method of High Spatial Resolution Determining a Position of a Singularized Molecule Which is Excitable for Emission of Luminescence Light
US-2019235220-A1 · Aug 1, 2019 · US
Method of and Apparatus for Spatially Measuring Nano-Scale Structures
US-2018259458-A1 · Sep 13, 2018 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 16 |
| Max Planck Gesellschaft | 9 |
| Max Plack Gesellschaft Zur Foerderung Der Wss E V | 1 |
| Max Planck Gesellschaft Zur Foerderung Der Wss | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F1/84 | 12 |
| G01N21/6458 | 9 |
| G02B21/0076 | 9 |
| G03F7/70666 | 9 |
| G01N21/956 | 7 |