Plasma Processing Apparatus
US-2025372353-A1 · Dec 4, 2025 · US
This page is not indexed by search engines while we improve data quality.
Guan Yu patents
Guan Yu is listed as an inventor on 10 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Guan Yu |
| Total patents | 10 |
| First publication | Nov 5, 2015 |
| Latest publication | Dec 4, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Induction coil assembly for plasma processing apparatus
US-12476077-B2 · Nov 18, 2025 · US
Plasma processing apparatus
US-12417900-B2 · Sep 16, 2025 · US
Plasma Processing Apparatus
US-2022415619-A1 · Dec 29, 2022 · US
Induction Coil Assembly for Plasma Processing Apparatus
US-2022208512-A1 · Jun 30, 2022 · US
Light-emitting device test systems
US-9874597-B2 · Jan 23, 2018 · US
LED calibration standard having fast stabilization and lasting stability
US-9526150-B1 · Dec 20, 2016 · US
Determination of absolute dimensions of particles used as calibration standards for optical measurement system
US-9500597-B2 · Nov 22, 2016 · US
Light-emitting device test systems
US-2015316604-A1 · Nov 5, 2015 · US
Method and System for Intrinsic LED Heating for Measurement
US-2015316411-A1 · Nov 5, 2015 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Beijing E Town Semiconductor Tech Co Ltd | 5 |
| Mattson Tech Inc | 5 |
| Kla Tencor Corp | 5 |
| Kla-Tenor Corp | 1 |
| Guan Yu | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/321 | 5 |
| H01J2237/334 | 3 |
| H01J37/32183 | 3 |
| H01J2237/2001 | 3 |
| H01J2237/002 | 3 |