Pressure control system for a multi-head processing chamber of a plasma processing apparatus
US-12347661-B2 · Jul 1, 2025 · US
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Guan Changle patents
Guan Changle is listed as an inventor on 7 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Guan Changle |
| Total patents | 7 |
| First publication | Dec 1, 2020 |
| Latest publication | Jul 1, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Process platform
US-2025014931-A1 · Jan 9, 2025 · US
Lift pin assembly for a plasma processing apparatus
US-12009184-B2 · Jun 11, 2024 · US
Conductive Member for Cleaning Focus Ring of a Plasma Processing Apparatus
US-2023071494-A1 · Mar 9, 2023 · US
Pressure Control System for a Multi-Head Processing Chamber of a Plasma Processing Apparatus
US-2023012873-A1 · Jan 19, 2023 · US
Lift Pin Assembly for a Plasma Processing Apparatus
US-2023010075-A1 · Jan 12, 2023 · US
Reaction chamber and plasma processing apparatus
US-10854482-B2 · Dec 1, 2020 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Beijing E Town Semiconductor Tech Co Ltd | 6 |
| Mattson Tech Inc | 5 |
| Beijing Naura Microelectronics Equipment Co Ltd | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/32431 | 4 |
| H01J37/32449 | 3 |
| H10P72/0421 | 3 |
| H10P72/722 | 3 |
| H01J37/32715 | 3 |