Method and apparatus for in-situ dry development
US-2026082870-A1 · Mar 19, 2026 · US
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Grzeskowiak Steven patents
Grzeskowiak Steven is listed as an inventor on 15 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Grzeskowiak Steven |
| Total patents | 15 |
| First publication | Mar 16, 2023 |
| Latest publication | Mar 19, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Conformal spacer-defined line cut structures
US-2026076155-A1 · Mar 12, 2026 · US
Halogen decontamination from metal-containing materials using chemical modification
US-2026061243-A1 · Mar 5, 2026 · US
Pillar spacer merging patterning
US-2026047405-A1 · Feb 12, 2026 · US
Double patterning method of patterning a substrate
US-12451354-B2 · Oct 21, 2025 · US
Double hardmasks for self-aligned multi-patterning processes
US-12451353-B2 · Oct 21, 2025 · US
Patterning a substrate using a multi-patterning technique
US-2025306463-A1 · Oct 2, 2025 · US
Method for patterning mask layer using metal-containing resist
US-2025298307-A1 · Sep 25, 2025 · US
Endpoint detection in dry development of photoresist
US-2025138429-A1 · May 1, 2025 · US
Method and Apparatus for In-Situ Dry Development
US-2024096622-A1 · Mar 21, 2024 · US
Recent patents
Latest publications not already listed above.
Double Patterning Method of Patterning a Substrate
US-2024087892-A1 · Mar 14, 2024 · US
Patterning a Semiconductor Substrate
US-2024063019-A1 · Feb 22, 2024 · US
Double hardmasks for self-aligned multi-patterning processes
US-2024047210-A1 · Feb 8, 2024 · US
UV Treatment of EUV Resists
US-2023152705-A1 · May 18, 2023 · US
Hybrid Development of EUV Resists
US-2023078946-A1 · Mar 16, 2023 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Tokyo Electron Ltd | 15 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P50/73 | 8 |
| H10P76/4085 | 8 |
| H01L21/31144 | 7 |
| G03F7/40 | 5 |
| G03F7/36 | 5 |