Mask metrology measuring device and method for examining a photomask
US-2025369899-A1 · Dec 4, 2025 · US
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Frank Thomas patents
Frank Thomas is listed as an inventor on 34 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Frank Thomas |
| Total patents | 34 |
| First publication | Jan 1, 2015 |
| Latest publication | Dec 4, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Seat assembly
US-2025276622-A1 · Sep 4, 2025 · US
Measurement apparatus, method for operating a mask-metrology measurement apparatus, and computer program product
US-2024255857-A1 · Aug 1, 2024 · US
Method and apparatus for characterizing a microlithographic mask
US-11619882-B2 · Apr 4, 2023 · US
Method and apparatus for characterizing a microlithographic mask
US-2022075272-A1 · Mar 10, 2022 · US
Device and method for characterizing a microlithographic mask
US-11112702-B2 · Sep 7, 2021 · US
Module
US-D929462-S · Aug 31, 2021 · US
Device for determining the exposure energy during the exposure of an element in an optical system, in particular for microlithography
US-11079604-B2 · Aug 3, 2021 · US
Powercore module
US-D925448-S · Jul 20, 2021 · US
Module
US-D921048-S · Jun 1, 2021 · US
Recent patents
Latest publications not already listed above.
Seat cushion assembly with pocket
US-10946778-B2 · Mar 16, 2021 · US
Device and method for characterizing a microlithographic mask
US-2021063892-A1 · Mar 4, 2021 · US
Powercore module
US-D906240-S · Dec 29, 2020 · US
Method and device for characterizing a mask for microlithography
US-10698318-B2 · Jun 30, 2020 · US
Device for determining the exposure energy during the exposure of an element in an optical system, in particular for microlithography
US-2020103668-A1 · Apr 2, 2020 · US
Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit
US-10578881-B2 · Mar 3, 2020 · US
Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit
US-2019121145-A1 · Apr 25, 2019 · US
Seat cushion assembly with pocket
US-2019039493-A1 · Feb 7, 2019 · US
Method and device for characterizing a mask for microlithography
US-2019011839-A1 · Jan 10, 2019 · US
Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit
US-10168539-B2 · Jan 1, 2019 · US
Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit
US-2018173001-A1 · Jun 21, 2018 · US
Power electronics arrangement and vehicle with said arrangement
US-9935032-B2 · Apr 3, 2018 · US
Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit
US-9904060-B2 · Feb 27, 2018 · US
Power electronics arrangement and vehicle with said arrangement
US-2017301600-A1 · Oct 19, 2017 · US
Vehicle interface connector device
US-D776618-S · Jan 17, 2017 · US
Power component device
US-9521781-B2 · Dec 13, 2016 · US
Vehicle interface connector device
US-D770982-S · Nov 8, 2016 · US
Vehicle interface connector device
US-D770392-S · Nov 1, 2016 · US
Vehicle interface connector device
US-D770390-S · Nov 1, 2016 · US
Vehicle interface connector device
US-D770391-S · Nov 1, 2016 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 15 |
| Zeiss Carl Ag | 7 |
| Bosch Gmbh Robert | 7 |
| Semikron Elektronik Gmbh & Co Kg | 7 |
| Lear Corp | 3 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F1/84 | 16 |
| G02B27/0961 | 8 |
| G02B27/0905 | 8 |
| G03F7/7085 | 8 |
| G02B21/06 | 7 |