EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods
US-10966308-B2 · Mar 30, 2021 · US
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Fomenkov Igor V patents
Fomenkov Igor V is listed as an inventor on 24 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Fomenkov Igor V |
| Total patents | 24 |
| First publication | Feb 17, 2015 |
| Latest publication | Mar 30, 2021 |
Notable patents
Publications ranked by popularity score, then publication date.
Faceted EUV optical element
US-10635002-B2 · Apr 28, 2020 · US
Method of controlling debris in an EUV light source
US-10490313-B2 · Nov 26, 2019 · US
Method of controlling debris in an euv light source
US-2019080811-A1 · Mar 14, 2019 · US
Apparatus for and method of controlling debris in an euv light source
US-2018330841-A1 · Nov 15, 2018 · US
Apparatus for and method of controlling debris in an EUV light source
US-10128017-B1 · Nov 13, 2018 · US
EUV LPP source with dose control and laser stabilization using variable width laser pulses
US-9832852-B1 · Nov 28, 2017 · US
Drive laser for EUV light source
US-9735535-B2 · Aug 15, 2017 · US
Laser produced plasma EUV light source
US-9713239-B2 · Jul 18, 2017 · US
Material supply apparatus for extreme ultraviolet light source having a filter constructed with a plurality of openings fluidly coupled to a plurality of through holes to remove non-target particles from the supply material
US-9669334-B2 · Jun 6, 2017 · US
Recent patents
Latest publications not already listed above.
Faceted EUV optical element
US-9541840-B2 · Jan 10, 2017 · US
Systems and methods for buffer gas flow stabilization in a laser produced plasma light source
US-9516730-B2 · Dec 6, 2016 · US
EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods
US-9390827-B2 · Jul 12, 2016 · US
Faceted euv optical element
US-2016179012-A1 · Jun 23, 2016 · US
Beam position control for an extreme ultraviolet light source
US-9167679-B2 · Oct 20, 2015 · US
Target for extreme ultraviolet light source
US-9155179-B2 · Oct 6, 2015 · US
Beam position control for an extreme ultraviolet light source
US-2015257246-A1 · Sep 10, 2015 · US
System, method and apparatus for aligning and synchronizing target material for optimum extreme ultraviolet light output
US-9119278-B2 · Aug 25, 2015 · US
Filter for material supply apparatus of an extreme ultraviolet light source
US-2015209701-A1 · Jul 30, 2015 · US
Filter for material supply apparatus of an extreme ultraviolet light source
US-9029813-B2 · May 12, 2015 · US
Beam position control for an extreme ultraviolet light source
US-9000405-B2 · Apr 7, 2015 · US
Systems and methods for optics cleaning in an EUV light source
US-9000404-B2 · Apr 7, 2015 · US
Target for extreme ultraviolet light source
US-2015076374-A1 · Mar 19, 2015 · US
Master oscillator—power amplifier drive laser with pre-pulse for EUV light source
US-8958143-B2 · Feb 17, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asml Netherlands Bv | 24 |
| Cymer LLC | 7 |
| Fomenkov Igor V | 3 |
| Partlo William N | 2 |
| Hansson Bjorn A M | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H05G2/008 | 19 |
| G03F7/70033 | 12 |
| H05G2/003 | 10 |
| G03F7/70175 | 8 |
| G03F7/70916 | 7 |