Drive laser for EUV light source

Patent metadata

Field	Value
Publication number	US-9735535-B2
Application number	US-201313960726-A
Country	US
Kind code	B2
Filing date	Aug 6, 2013
Priority date	May 3, 2001
Publication date	Aug 15, 2017
Grant date	Aug 15, 2017

Abstract

Devices and methods for generating EUV light are disclosed. The device comprises an oscillator having an oscillator cavity length, L o , and defining an oscillator path and a multi-pass optical amplifier coupled with the oscillator to establish a combined optical cavity including the oscillator path, the combined cavity having a length, L combined , where L combined =(N+x)*L o , where “N” is an integer and “x” is a number between 0.4 and 0.6. The amplifier comprises a polarization discriminating optic inputting light traveling along a first beam path from the oscillator and having substantially a first linear polarization into the amplifier and outputting light having substantially a linear polarization orthogonal to the first polarization out of the amplifier along a second beam path.

First claim

We claim:

1. A device comprising:
an oscillator having an oscillator cavity length, L o , and defining an oscillator path;
a multi-pass optical amplifier coupled with said oscillator to establish a combined optical cavity including the oscillator path, the combined cavity having a length, L combined , where L combined =(N+x)*L o , where “N” is an integer and “x” is a number between 0.4 and 0.6,
wherein the amplifier comprises a polarization discriminating optic inputting light traveling along a first beam path from the oscillator and having substantially a first linear polarization into the amplifier and outputting light having substantially a linear polarization orthogonal to said first polarization out of said amplifier along a second beam path.

2. A device as recited in claim 1 wherein said oscillator cavity comprises an optic defining an end of the oscillator cavity and the device comprises an electro-actuable element coupled to the optic and controllable to adjust the oscillator cavity length.

3. A device as recited in claim 1 wherein the oscillator comprises an oscillator output optic, the amplifier comprises an amplifier input optic and the device further comprises at least one moveable optic to adjust a beam path length between said oscillator output optic and said amplifier input optic.

4. A device as recited in claim 1 wherein the oscillator comprises a cavity dumped oscillator.

5. A device comprising:
an oscillator having an oscillator cavity length L o and defining an optical path, said oscillator having an oscillator output optic; and
an optical amplifier having an optical amplifier input optic coupled to receive first light from said oscillator output optic, said first light having a first linear polarization, and for outputting second light having a linear polarization orthogonal to said first linear polarization,
wherein one or both of a length of said cavity length L o and a distance between said oscillator output optic and optical amplifier input optic being adjustable.

6. The device of claim 5 wherein both said length of said cavity length L o and said distance between said oscillator output optic and optical amplifier input optic being adjustable.

7. The device of claim 6 wherein a combined cavity formed by said oscillator and said optical amplifier has a length L combined , wherein L combined =(N+x)*L o , where “N” is an integer and “x” is a number between 0.4 and 0.6.

8. The device of claim 5 wherein said first light passes a plurality of mirrors along the path between said oscillator output optic and optical amplifier input optic, one or more distances among said plurality of mirrors being adjustable to adjust said distance between said oscillator output optic and optical amplifier input optic.

9. The device of claim 5 wherein said oscillator is an RF, continuously pumped CO2 laser.

10. The device of claim 5 wherein said optical amplifier is an RF, continuously pumped CO2 laser having one or more chambers arranged in series and a gain media amplifying said first light.

11. The device of claim 5 wherein said oscillator includes a cavity-dumped oscillator.

12. A method for producing light, comprising:
providing an oscillator having an oscillator cavity length L o and defining an optical path, said oscillator having an oscillator output optic for outputting first light having a first linear polarization; and
providing an optical amplifier having an optical amplifier input optic coupled to receive said first light from said oscillator output optic and for outputting second light having a linear polarization orthogonal to said first linear polarization; and
adjusting one or both of a length of said cavity length L o and a distance between said oscillator output optic and optical amplifier input optic such that a combined cavity formed by said oscillator and said optical amplifier has a length L combined , wherein L combined =(N+x)*L o , where “N” is an integer and “x” is a number between 0.4 and 0.6.

13. The method of claim 12 wherein said adjusting comprises adjusting said length of said cavity length L o without adjusting said distance between said oscillator output optic and optical amplifier input optic.

14. The method of claim 12 wherein said adjusting comprises adjusting distance between said oscillator output optic and optical amplifier input optic without adjusting said length of said cavity length L o .

15. The device of claim 12 wherein said first light passes a plurality of mirrors along the path between said oscillator output optic and optical amplifier input optic, said adjusting comprises modifying one or more distances among said plurality of mirrors to modify said distance between said oscillator output optic and optical amplifier input optic.

16. The method of claim 12 wherein said adjusting comprises adjusting both said length of said cavity length L o and said distance between said oscillator output optic and optical amplifier input optic.

Assignees

• Cymer LLC
• Asml Netherlands Bv

Inventors

• Ershov Alexander I
• Hoffman Jerzy R
• Bowering Norbert R
• Fomenkov Igor V

Classifications

• H05G2/0086

  Optical arrangements for conveying the laser beam to the plasma generation location · CPC title

• H01S3/105 Primary

  by controlling the mutual position or the reflecting properties of the reflectors of the cavity {, e.g. by controlling the cavity length}({H01S3/10076}, H01S3/13 take precedence) · CPC title

• H01S3/005

  Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping (shaping laser beam for working metal or other materials B23K26/06; optical elements, systems or apparatus in general G02B) · CPC title

• G03F7/70033 Primary

  by plasma extreme ultraviolet [EUV] sources · CPC title

• H05G2/008

  involving an energy-carrying beam in the process of plasma generation · CPC title