Lithographic apparatus and a device manufacturing method
US-RE49297-E · Nov 15, 2022 · US
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Feng Peng patents
Feng Peng is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Feng Peng |
| Total patents | 4 |
| First publication | Apr 11, 2017 |
| Latest publication | Nov 15, 2022 |
Notable patents
Publications ranked by popularity score, then publication date.
Lithographic apparatus and a device manufacturing method
US-10191377-B2 · Jan 29, 2019 · US
Lithographic apparatus and a device manufacturing method
US-2017212421-A1 · Jul 27, 2017 · US
Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table
US-9618858-B2 · Apr 11, 2017 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asml Netherlands Bv | 5 |
| Patel Hrishikesh | 1 |
| Jacobs Johannes Henricus Wilhelmus | 1 |
| Kusters Gerardus Adrianus Antonius Maria | 1 |
| Laurent Thibault Simon Mathieu | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P76/2041 | 4 |
| H10P72/0431 | 4 |
| G03F7/70341 | 4 |
| G03F7/3085 | 4 |
| G03F7/2041 | 4 |