Heater cover plate for uniformity improvement
US-12315745-B2 · May 27, 2025 · US
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Durukan Ilker patents
Durukan Ilker is listed as an inventor on 17 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Durukan Ilker |
| Total patents | 17 |
| First publication | Oct 5, 2017 |
| Latest publication | May 27, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Part, sensor, and metrology data integration
US-2024061409-A1 · Feb 22, 2024 · US
Part, sensor, and metrology data integration
US-11853042-B2 · Dec 26, 2023 · US
Heater cover plate for uniformity improvement
US-2023125613-A1 · Apr 27, 2023 · US
Methods and apparatus to reduce pressure fluctuations in an ampoule of a chemical delivery system
US-11566327-B2 · Jan 31, 2023 · US
Heater cover plate for uniformity improvement
US-11562914-B2 · Jan 24, 2023 · US
Part, sensor, and metrology data integration
US-2022260978-A1 · Aug 18, 2022 · US
Methods and apparatus to reduce pressure fluctuations in an ampoule of a chemical delivery system
US-2022162752-A1 · May 26, 2022 · US
Heater cover plate for uniformity improvement
US-2021343557-A1 · Nov 4, 2021 · US
High temperature process chamber lid
US-10879090-B2 · Dec 29, 2020 · US
Recent patents
Latest publications not already listed above.
Apparatus and method for providing a uniform flow of gas
US-10519546-B2 · Dec 31, 2019 · US
Apparatus And Method For Providing A Uniform Flow Of Gas
US-2019078205-A1 · Mar 14, 2019 · US
Apparatus and method for providing a uniform flow of gas
US-10167553-B2 · Jan 1, 2019 · US
Methods and apparatus for liquid chemical delivery
US-9914632-B2 · Mar 13, 2018 · US
High Temperature Process Chamber Lid
US-2018053667-A1 · Feb 22, 2018 · US
High temperature process chamber lid
US-9831109-B2 · Nov 28, 2017 · US
Apparatus And Method For Providing A Uniform Flow Of Gas
US-2017283947-A1 · Oct 5, 2017 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 17 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C16/455 | 6 |
| C23C16/45544 | 4 |
| C23C16/50 | 4 |
| C23C16/45565 | 4 |
| C23C16/45502 | 4 |