In-situ plasma cleaning of process chamber components
US-11495434-B2 · Nov 8, 2022 · US
This page is not indexed by search engines while we improve data quality.
Downey Ryan patents
Downey Ryan is listed as an inventor on 7 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Downey Ryan |
| Total patents | 7 |
| First publication | Dec 15, 2016 |
| Latest publication | Nov 8, 2022 |
Notable patents
Publications ranked by popularity score, then publication date.
In-situ plasma cleaning of process chamber components
US-11037758-B2 · Jun 15, 2021 · US
In-situ plasma cleaning of process chamber components
US-2021013001-A1 · Jan 14, 2021 · US
In-situ plasma cleaning of process chamber components
US-2020126757-A1 · Apr 23, 2020 · US
In-situ plasma cleaning of process chamber components
US-10522330-B2 · Dec 31, 2019 · US
In-situ plasma cleaning of process chamber electrostatic elements having varied geometries
US-2017092473-A1 · Mar 30, 2017 · US
In-situ plasma cleaning of process chamber components
US-2016365225-A1 · Dec 15, 2016 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Varian Semiconductor Equipment Ass Inc | 7 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/32862 | 7 |
| H01J2237/022 | 7 |
| H01J37/3171 | 7 |
| H01J2237/335 | 7 |
| H01J2237/31705 | 7 |