Mask metrology measuring device and method for examining a photomask
US-2025369899-A1 · Dec 4, 2025 · US
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Doering Dirk patents
Doering Dirk is listed as an inventor on 24 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Doering Dirk |
| Total patents | 24 |
| First publication | Jan 1, 2015 |
| Latest publication | Dec 4, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Illumination optical unit for a mask inspection system
US-2025093770-A1 · Mar 20, 2025 · US
Catadioptric lens and optical system comprising such a lens
US-11561381-B2 · Jan 24, 2023 · US
Illumination device for a projector having a light modulator
US-11281085-B2 · Mar 22, 2022 · US
Illumination device for a projector having a light modulator
US-11137615-B2 · Oct 5, 2021 · US
Lithography apparatus comprising a plurality of individually controllable write heads
US-11003090-B2 · May 11, 2021 · US
Method and apparatus for determining a defocusing valve and for image-based determination of a dimensional size
US-10719915-B2 · Jul 21, 2020 · US
Lithography apparatus comprising a plurality of individually controllable write heads
US-2020166852-A1 · May 28, 2020 · US
Illumination device for a projector having a light modulator
US-2020159031-A1 · May 21, 2020 · US
Illumination device for a projector having a light modulator
US-2020159099-A1 · May 21, 2020 · US
Recent patents
Latest publications not already listed above.
Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit
US-10578881-B2 · Mar 3, 2020 · US
Catadioptric lens and optical system comprising such a lens
US-2019369374-A1 · Dec 5, 2019 · US
Ophthalmological device
US-10322031-B2 · Jun 18, 2019 · US
Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit
US-2019121145-A1 · Apr 25, 2019 · US
Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit
US-10168539-B2 · Jan 1, 2019 · US
Ophthalmological device
US-2018325727-A1 · Nov 15, 2018 · US
Ophthalmological device
US-10004641-B2 · Jun 26, 2018 · US
Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit
US-2018173001-A1 · Jun 21, 2018 · US
Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit
US-9904060-B2 · Feb 27, 2018 · US
Lithography apparatus comprising a plurality of individually controllable write heads
US-2017255110-A1 · Sep 7, 2017 · US
Method and apparatus for determining a defocussing value and for image-based determination of a dimensional size
US-2017249722-A1 · Aug 31, 2017 · US
Ophthalmological device
US-2017128262-A1 · May 11, 2017 · US
Ophthalmological device
US-9554943-B2 · Jan 31, 2017 · US
Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit
US-2015001408-A1 · Jan 1, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 12 |
| Zeiss Carl Ag | 6 |
| Zeiss Carl Meditec Ag | 5 |
| Zeiss Carl Jena Gmbh | 4 |
| Zeiss Carl Industrielle Messtechnik Gmbh | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G02B27/0905 | 8 |
| G03F1/84 | 8 |
| G02B26/0833 | 6 |
| G02B27/0961 | 6 |
| G02B26/0808 | 6 |