Predicting and controlling critical dimension issues and pattern defectivity in wafers using interferometry
US-9558545-B2 · Jan 31, 2017 · US
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Dey Soham patents
Dey Soham is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Dey Soham |
| Total patents | 2 |
| First publication | Jun 9, 2016 |
| Latest publication | Jan 31, 2017 |
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Kla Tencor Corp | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P74/203 | 2 |
| H10P74/23 | 2 |
| G06T7/001 | 2 |
| G06T7/0004 | 2 |
| G06F18/22 | 2 |