Fluoride coating to improve chamber performance
US-12592364-B2 · Mar 31, 2026 · US
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Deepak Nitin patents
Deepak Nitin is listed as an inventor on 27 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Deepak Nitin |
| Total patents | 27 |
| First publication | Sep 19, 2019 |
| Latest publication | Mar 31, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Soft touch coating materials for substrate handling
US-2025149373-A1 · May 8, 2025 · US
Air-spaced encapsulated dielectric nanopillars for flat optical devices
US-12216243-B2 · Feb 4, 2025 · US
Interface tuning for erosion and corrosion resistant coatings for semiconductor components
US-2025003061-A1 · Jan 2, 2025 · US
Cleaning materials and processes for lithium processing equipment
US-12134822-B2 · Nov 5, 2024 · US
Coating components for semiconductor processing with fluorine-containing materials
US-2024347336-A1 · Oct 17, 2024 · US
Ceramic synthesis through surface coating of powders
US-2024327300-A1 · Oct 3, 2024 · US
Protection treatments for surfaces of semiconductor fabrication equipment
US-2024153745-A1 · May 9, 2024 · US
Semiconductor cleaning using plasma-free precursors
US-2024145230-A1 · May 2, 2024 · US
Etching of alkali metal compounds
US-11926903-B2 · Mar 12, 2024 · US
Recent patents
Latest publications not already listed above.
Methods for refurbishing aerospace components
US-11739429-B2 · Aug 29, 2023 · US
Metal oxyfluoride film formation methods
US-11702744-B2 · Jul 18, 2023 · US
Etching Of Alkali Metal Compounds
US-2022396732-A1 · Dec 15, 2022 · US
Atomic layer etching of metals
US-11424134-B2 · Aug 23, 2022 · US
Metal oxyfluoride film formation methods
US-2022259735-A1 · Aug 18, 2022 · US
Method of forming a fluorinated metal film
US-11390947-B2 · Jul 19, 2022 · US
Cleaning materials and processes for lithium processing equipment
US-2022162747-A1 · May 26, 2022 · US
Aluminum oxide protective coatings on turbocharger components and other rotary equipment components
US-2022081763-A1 · Mar 17, 2022 · US
Methods for detecting end-points for cleaning processes of aerospace components
US-2022050051-A1 · Feb 17, 2022 · US
Fluoride coating to improve chamber performance
US-2022037126-A1 · Feb 3, 2022 · US
Methods for refurbishing aerospace components
US-2022002883-A1 · Jan 6, 2022 · US
Oxide layer compositions for turbine engine components
US-2021381386-A1 · Dec 9, 2021 · US
Atomic layer etching of metals
US-2021090897-A1 · Mar 25, 2021 · US
Air-spaced encapsulated dielectric nanopillars for flat optical devices
US-2020400990-A1 · Dec 24, 2020 · US
Oxy-fluoride compounds for chamber parts protection
US-2020283897-A1 · Sep 10, 2020 · US
Selective atomic layer etching of semiconductor materials
US-10497573-B2 · Dec 3, 2019 · US
Selective atomic layer etching of semiconductor materials
US-2019287808-A1 · Sep 19, 2019 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 27 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C16/4404 | 9 |
| C23C16/30 | 7 |
| C23C16/403 | 6 |
| C23C16/45553 | 6 |
| C23C16/40 | 5 |