Vapor deposition deposited photoresist, and manufacturing and lithography systems therefor
US-9829805-B2 · Nov 28, 2017 · US
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Deaton Paul patents
Deaton Paul is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Deaton Paul |
| Total patents | 4 |
| First publication | Jan 12, 2016 |
| Latest publication | Nov 28, 2017 |
Notable patents
Publications ranked by popularity score, then publication date.
Vapor deposition deposited photoresist, and manufacturing and lithography systems therefor
US-9632411-B2 · Apr 25, 2017 · US
Vapor Deposition Deposited Photoresist, And Manufacturing And Lithography Systems Therefor
US-2017068174-A1 · Mar 9, 2017 · US
Atomic layer deposition of hafnium or zirconium alloy films
US-9236467-B2 · Jan 12, 2016 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 4 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/09 | 3 |
| G03F7/2037 | 3 |
| G03F7/70716 | 3 |
| G03F7/167 | 3 |
| H10P14/432 | 1 |