Temperature control system and plasma processing system
US-2025191899-A1 · Jun 12, 2025 · US
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Chiba Kazuhiro patents
Chiba Kazuhiro is listed as an inventor on 15 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Chiba Kazuhiro |
| Total patents | 15 |
| First publication | Mar 3, 2016 |
| Latest publication | Jun 12, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Mounting substrate, blanking aperture array chip, blanking aperture array system and multi charged particle beam irradiation apparatus
US-2024013999-A1 · Jan 11, 2024 · US
Radio terminal, center server apparatus, and method therefor
US-2023224779-A1 · Jul 13, 2023 · US
Pcf apparatus, af apparatus, nef apparatus, and methods thereof
US-2022295363-A1 · Sep 15, 2022 · US
Ue, af apparatus, smf apparatus, and methods thereof
US-2022264679-A1 · Aug 18, 2022 · US
Heating device and turbo molecular pump
US-10801521-B2 · Oct 13, 2020 · US
Semiconductor device
US-10607908-B2 · Mar 31, 2020 · US
Semiconductor device
US-2018374768-A1 · Dec 27, 2018 · US
Blanking device for multi-beam of charged particle writing apparatus using multi-beam of charged particle and defective beam blocking method for multi-beam of charged particle
US-9805905-B2 · Oct 31, 2017 · US
Heating device and turbo molecular pump
US-2017298958-A1 · Oct 19, 2017 · US
Recent patents
Latest publications not already listed above.
Blanking aperture array device for multi-beams, and fabrication method of blanking aperture array device for multi-beams
US-9530610-B2 · Dec 27, 2016 · US
Blanking aperture array and charged particle beam writing apparatus
US-9530616-B2 · Dec 27, 2016 · US
Blanking aperture array device for multi-beams, and fabrication method of blanking aperture array device for multi-beams
US-2016155600-A1 · Jun 2, 2016 · US
Blanking aperture array and charged particle beam writing apparatus
US-2016099129-A1 · Apr 7, 2016 · US
Blanking device for multi charged particle beams, multi charged particle beam writing apparatus, and defective beam blocking method for multi charged particle beams
US-2016064179-A1 · Mar 3, 2016 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Nuflare Technology Inc | 9 |
| Tokyo Electron Ltd | 3 |
| Nec Corp | 3 |
| Ntt advanced tech corp | 1 |
| Ntt Advanced Tech Kk | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/3177 | 7 |
| H01J37/045 | 7 |
| H01J2237/0435 | 6 |
| H01J2237/0437 | 5 |
| H01J2237/3175 | 5 |