Source reagent-based delivery of fluid with high material flux for batch deposition
US-10385452-B2 · Aug 20, 2019 · US
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Cheon Sebum patents
Cheon Sebum is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Cheon Sebum |
| Total patents | 4 |
| First publication | Jul 9, 2015 |
| Latest publication | Aug 20, 2019 |
Notable patents
Publications ranked by popularity score, then publication date.
Opto-electronic inspection quality assurance system for fluid dispensing valves
US-9518933-B2 · Dec 13, 2016 · US
Opto-electronic inspection quality assurance system for fluid dispensing valves
US-2015276619-A1 · Oct 1, 2015 · US
Source reagent-based delivery of fluid with high material flux for batch deposition
US-2015191819-A1 · Jul 9, 2015 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Entegris Inc | 4 |
| Advanced Tech Materials | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G01B11/00 | 2 |
| G01B13/00 | 2 |
| G01N21/8806 | 2 |
| G01B11/303 | 2 |
| G01N2201/062 | 2 |