Opto-electronic inspection quality assurance system for fluid dispensing valves

Patent metadata

Field	Value
Publication number	US-9518933-B2
Application number	US-201314433363-A
Country	US
Kind code	B2
Filing date	Oct 12, 2013
Priority date	Oct 13, 2012
Publication date	Dec 13, 2016
Grant date	Dec 13, 2016

Abstract

An optoelectronic inspection system useful for quality assurance determinations of fluid dispensing valves, e.g., as installed on fluid storage and dispensing vessels, and associated methodology and non-transitory computer readable media storing machine-executable instructions for such quality assurance determinations, are described. The optoelectronic inspection is applicable to flow control valves used on fluid storage and dispensing packages including physical adsorbent-based and/or pressure-regulated vessels, such as are used for supply of processing fluids used in the manufacture of semiconductor products, flat panel displays, and solar panels.

First claim

What is claimed is:

1. An optoelectronic inspection system for determining acceptability of a valve structure, comprising:
an inspection station adapted to position the valve structure for optoelectronic imaging;
a light source arranged to impinge light on the valve structure;
a camera and lens imaging assembly arranged to receive light resulting from interaction of the valve structure and light impinged on the valve structure from the light source, and to responsively generate an optoelectronic imaging output;
a central processing unit arranged to receive the optoelectronic imaging output from the imaging assembly and to responsively generate an inspection output indicative of whether the valve structure satisfies predetermined acceptability criteria,
wherein the central processing unit receiving the optoelectronic imaging output from the imaging assembly constitutes image data of said optoelectronic imaging output as an autocorrelation function that then is Fourier transformed to yield an illumination power spectrum for digital comparison to baseline spectra for acceptable valve structure, and wherein the inspection output comprises a quality assurance determination as a visual output to a display screen.

2. The optoelectronic inspection system of claim 1 , wherein the inspection station adapted to position the valve structure for optoelectronic imaging comprises a holder for retaining a fluid supply package including a valve head assembly comprising said valve structure in said position for optoelectronic imaging.

3. The optoelectronic inspection system of claim 1 , wherein the light source comprises an illumination device selected from the group consisting of incandescent lamps, light emitting diodes, lasers, ultraviolet lamps, and infrared lamps.

4. The optoelectronic inspection system of claim 1 , wherein the central processing unit comprises a processor generating a colorimetric inspection output indicative of whether the valve structure satisfies predetermined acceptability criteria.

5. The optoelectronic inspection system of claim 4 , wherein said colorimetric inspection output comprises a green color output when a valve structure satisfies the predetermined acceptability criteria, and comprises a red color output when a valve structure does not satisfy the predetermined acceptability criteria.

6. The optoelectronic inspection system of claim 1 , wherein the central processing unit comprises a non-transitory computer readable medium storing machine-executable instructions for determining acceptability of a valve structure.

7. The optoelectronic inspection system of claim 1 , wherein the central processing unit comprises a non-transitory computer readable medium storing a database of criteria of acceptable valve structure.

8. The optoelectronic inspection system of claim 1 , wherein the central processing unit is adapted to process the optoelectronic imaging output from the imaging assembly for determination of compatibility thereof with said criteria of acceptable valve structure in order to responsively generate the inspection output indicative of whether the valve structure satisfies predetermined acceptability criteria.

9. The optoelectronic inspection system of claim 1 , further comprising a transporter apparatus adapted to move a fluid supply package from the inspection station to one of multiple receiving areas dependent on extent of matching by a valve structure thereof to the predetermined acceptability criteria.

10. A method for determining acceptability of a valve structure, comprising:
impinging light from a light source on the valve structure to cause an interaction of the impinged light and the valve structure producing an imaging response;
optoelectronically generating an optoelectronic imaging output based on the imaging response; and
electronically generating, via a central processing unit receiving and processing the optoelectronic imaging output, an inspection output indicative of whether the valve structure satisfies predetermined acceptability criteria,
wherein the central processing unit receiving the optoelectronic imaging output constitutes image data of said optoelectronic imaging output as an autocorrelation function that then is Fourier transformed to yield an illumination power spectrum for digital comparison to baseline spectra for acceptable valve structure, in generating said inspection output, and wherein the inspection output comprises a quality assurance determination as a visual output to a display screen.

11. The method of claim 10 , wherein the valve structure is a component of a valve head assembly of a fluid supply package.

12. The method of claim 10 , wherein the light source comprises an illumination device selected from the group consisting of incandescent lamps, light emitting diodes, lasers, ultraviolet lamps, and infrared lamps.

13. The method of claim 10 , wherein the inspection output comprises a colorimetric inspection output indicative of whether the valve structure satisfies predetermined acceptability criteria.

14. The method of claim 13 , wherein said colorimetric inspection output comprises a green color output when a valve structure satisfies the predetermined acceptability criteria, and comprises a red color output when a valve structure does not satisfy the predetermined acceptability criteria.

15. The method of claim 10 , wherein the central processing unit comprises a non-transitory computer readable medium storing machine-executable instructions for determining acceptability of a valve structure.

16. The method of claim 10 , wherein the central processing unit comprises a non-transitory computer readable medium storing a database of criteria of acceptable valve structure.

17. The method of claim 10 , wherein the central processing unit is adapted to process the optoelectronic imaging output for determination of compatibility thereof with said criteria of acceptable valve structure in order to responsively generate the inspection output indicative of whether the valve structure satisfies predetermined acceptability criteria.

18. The method of claim 10 , further comprising, after generating the inspection output, mechanically moving a fluid supply package comprising the valve structure to one of multiple receiving areas dependent on extent of matching by a valve structure thereof to the predetermined acceptability criteria.

19. A non-transitory computer readable medium storing machine-executable instructions which when executed carry out a quality assurance determination of a fluid dispensing valve including valve structure on which light has been impinged to produce an imaging response optoelectronically converted to an optoelectronic imaging output, wherein said optoelectronic imaging output is processed according to said machine-executable instructions to generate an inspection output indicative of whether the valve structure satisfies predetermined acceptability criteria, comprising constituting image data of said optoelectronic imaging output as an autocorrelation function that then is Fourier transformed to yield an illumination power spectrum for digital comparison to baseline spectra for acceptable valve structure, in generating said inspection output, and wherein the inspection output comprises a quality assurance determination as a visual output to a display screen.

20. The non-transitory computer readable medium of claim 19 , wherein the processing of the optoelectronic imaging output comprises correlation thereof with fluid dispensing valve baseline

Assignees

• Entegris Inc

Inventors

• Chatterton Thomas E
• Cheon Sebum

Classifications

• G01N2201/06113

  Coherent sources; lasers · CPC title

• G01B13/00

  Measuring arrangements characterised by the use of fluids · CPC title

• G01N21/95 Primary

  characterised by the material or shape of the object to be examined (G01N21/89 - G01N21/91, G01N21/94 take precedence) · CPC title

• G01B11/303

  using photoelectric detection means · CPC title

• G01B11/00

  Measuring arrangements characterised by the use of optical techniques · CPC title