Overlay correction for advanced integrated-circuit devices
US-12585182-B2 · Mar 24, 2026 · US
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Chang John patents
Chang John is listed as an inventor on 3 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Chang John |
| Total patents | 3 |
| First publication | Jul 4, 2024 |
| Latest publication | Mar 24, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Metrology to reduce overlay error
US-2025355368-A1 · Nov 20, 2025 · US
Overlay correction for advanced integrated-circuit devices
US-2024219825-A1 · Jul 4, 2024 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Onto Innovation Inc | 3 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70633 | 3 |
| G03F7/2022 | 2 |
| G03F1/84 | 2 |
| G03F1/72 | 2 |
| G03F7/70516 | 2 |