Etching system for forming recessed features with high aspect ratio
US-2026033264-A1 · Jan 29, 2026 · US
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Catano Christopher patents
Catano Christopher is listed as an inventor on 14 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Catano Christopher |
| Total patents | 14 |
| First publication | Jan 23, 2020 |
| Latest publication | Jan 29, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Method for protecting graphene layer during metal etching
US-2025308988-A1 · Oct 2, 2025 · US
Methods and structures for improving etch profile of metallic layer
US-2025210374-A1 · Jun 26, 2025 · US
Method for ion-assisted self-limited conformal etch
US-2024379372-A1 · Nov 14, 2024 · US
Method for gate stack formation and etching
US-12009430-B2 · Jun 11, 2024 · US
Plasma etching techniques
US-11837467-B2 · Dec 5, 2023 · US
Plasma Etching Techniques
US-2022351970-A1 · Nov 3, 2022 · US
Plasma etching techniques
US-11424120-B2 · Aug 23, 2022 · US
Plasma etching techniques
US-2022238309-A1 · Jul 28, 2022 · US
Method for selective etching at an interface between materials
US-11133194-B2 · Sep 28, 2021 · US
Recent patents
Latest publications not already listed above.
Methods to protect nitride layers during formation of silicon germanium nano-wires in microelectronic workpieces
US-10903077-B2 · Jan 26, 2021 · US
Method for gate stack formation and etching
US-2020273992-A1 · Aug 27, 2020 · US
Method for Selective Etching at an Interface Between Materials
US-2020266070-A1 · Aug 20, 2020 · US
Methods to protect nitride layers during formation of silicon germanium nano-wires in microelectronic workpieces
US-2020027736-A1 · Jan 23, 2020 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Tokyo Electron Ltd | 14 |
| Toyko Electron Ltd | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10D30/6735 | 9 |
| H10P50/283 | 9 |
| H10P50/242 | 9 |
| H10P14/3411 | 8 |
| H10D30/6757 | 8 |