Plasma resistant coating of porous body by atomic layer deposition
US-10975469-B2 · Apr 13, 2021 · US
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Byun Daniel patents
Byun Daniel is listed as an inventor on 5 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Byun Daniel |
| Total patents | 5 |
| First publication | Sep 20, 2018 |
| Latest publication | Apr 13, 2021 |
Notable patents
Publications ranked by popularity score, then publication date.
Plasma resistant coating of porous body by atomic layer deposition
US-10745805-B2 · Aug 18, 2020 · US
Erosion resistant atomic layer deposition coatings
US-2018337026-A1 · Nov 22, 2018 · US
Plasma resistant coating of porous body by atomic layer deposition
US-2018265972-A1 · Sep 20, 2018 · US
Plasma resistant coating of porous body by atomic layer deposition
US-2018265973-A1 · Sep 20, 2018 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 5 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/722 | 5 |
| C23C16/45525 | 5 |
| C23C16/40 | 5 |
| C23C16/045 | 4 |
| H01J37/32477 | 4 |