Heating assembly and method for a processing chamber
US-2026040408-A1 · Feb 5, 2026 · US
This page is not indexed by search engines while we improve data quality.
Burrows Brian patents
Burrows Brian is listed as an inventor on 14 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Burrows Brian |
| Total patents | 14 |
| First publication | Sep 22, 2015 |
| Latest publication | Feb 5, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Chamber for processing substrates at high temperatures
US-2026040866-A1 · Feb 5, 2026 · US
Method and processing chamber for reducing warpage of a substrate
US-2026040874-A1 · Feb 5, 2026 · US
Remote plasma sources
US-2025316454-A1 · Oct 9, 2025 · US
Multi-thermal cvd chambers with shared gas delivery and exhaust system
US-2024318351-A1 · Sep 26, 2024 · US
Linear lamp array for improved thermal uniformity and profile control
US-11680338-B2 · Jun 20, 2023 · US
Linear lamp array for improved thermal uniformity and profile control
US-2021189593-A1 · Jun 24, 2021 · US
Reflector and susceptor assembly for chemical vapor deposition reactor
US-10932323-B2 · Feb 23, 2021 · US
Qualification and repair station
US-2020290835-A1 · Sep 17, 2020 · US
Epitaxial lift off systems and methods
US-10259206-B2 · Apr 16, 2019 · US
Recent patents
Latest publications not already listed above.
Reflector and susceptor assembly for chemical vapor deposition reactor
US-2017037515-A1 · Feb 9, 2017 · US
Epitaxial lift off systems and methods
US-9381731-B2 · Jul 5, 2016 · US
Fastener system for supporting a liner plate in a gas showerhead reactor
US-9267205-B1 · Feb 23, 2016 · US
System and method for improved epitaxial lift off
US-9142707-B2 · Sep 22, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 8 |
| Alta Devices Inc | 6 |
| Burrows Brian | 2 |
| Ishikawa David | 1 |
| Cabreros Abril | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H05B3/0047 | 5 |
| C30B25/105 | 4 |
| C30B25/08 | 4 |
| H10P72/0436 | 4 |
| C23C16/46 | 3 |