Linear lamp array for improved thermal uniformity and profile control

Patent metadata

Field	Value
Publication number	US-11680338-B2
Application number	US-202016833352-A
Country	US
Kind code	B2
Filing date	Mar 27, 2020
Priority date	Dec 19, 2019
Publication date	Jun 20, 2023
Grant date	Jun 20, 2023

Abstract

Methods and apparatus for an upper reflector assembly for use in a process chamber are provided herein. In some embodiments, an upper reflector assembly for use in a process chamber includes a reflector mounting ring; and upper reflector plate coupled to the reflector mounting ring and having an upper surface and lower surface, wherein the lower surface includes a plurality of linear channels extending substantially parallel to each other across the lower surface, and wherein the upper reflector plate includes air cooling slots extending from the upper surface to the lower surface.

First claim

The invention claimed is:

1. An upper reflector assembly for use in a process chamber, comprising:
an upper reflector plate comprising:
an upper surface;
a lower surface;
a plurality of linear channels extending substantially parallel to each other across the lower surface; and air cooling slots extending from the upper surface to the lower surface, the plurality of air cooling slots comprising a plurality of first slots and a plurality of second slots, the plurality of first slots having a smaller depth than the plurality of second slots, wherein the plurality of first slots extend at an angle less than 90 degrees with respect to the upper surface of the upper reflector plate.

2. The upper reflector assembly of claim 1 , wherein the plurality of second slots extend orthogonal to the upper surface.

3. The upper reflector assembly of claim 1 , wherein the upper surface includes a plurality of coolant channels.

4. The upper reflector assembly of claim 1 , wherein the plurality of linear channels have different cross-sectional shapes.

5. The upper reflector assembly of claim 1 , wherein the plurality of linear channels have at least one of a U-shaped cross section, a V-shaped cross section, an elliptical cross section, a parabolic cross section, or a rectangular cross section.

6. The upper reflector assembly of claim 1 , further comprising a reflector mounting ring coupled to the upper reflector plate and an inner housing coupled to the reflector mounting ring and a top plate coupled to the inner housing, wherein the top plate includes an air inlet configured to facilitate a flow of air through the inner housing and through the air cooling slots.

7. The upper reflector assembly of claim 6 , further comprising one or more flow turning vanes disposed between the top plate and the upper reflector plate to direct the flow of air from the air inlet to various zones of the upper reflector plate.

8. An upper reflector plate for use in a process chamber, comprising:
an upper surface;
a lower surface;
a plurality of linear channels extending substantially parallel to each other across the lower surface, wherein each of the plurality of linear channels have one of a U-shaped cross section, a V-shaped cross section, an elliptical cross section, a parabolic cross section, or a rectangular cross section, wherein one or more of the plurality of linear channels have different cross sectional shapes from the remaining linear channels of the plurality of channels;
a plurality of air cooling slots extending from the upper surface to the lower surface; and
a plurality of coolant channels formed in the upper surface.

9. The upper reflector plate of claim 8 , wherein the air cooling slots include a plurality of first slots and a plurality of second slots, wherein the plurality of first slots have a smaller depth than the plurality of second slots.

10. The upper reflector plate of claim 9 , wherein the plurality of first slots extend at an angle of less than 90 degrees with respect to the upper surface.

11. The upper reflector plate of claim 8 , wherein the upper reflector plate includes an opening extending from the upper surface to the lower surface and covered with a transparent window.

12. The upper reflector plate of claim 8 , further comprising a gold plating disposed thereon.

13. An upper reflector assembly for use in a process chamber, comprising:
an upper reflector plate comprising:
an upper surface;
a lower surface;
a plurality of linear channels extending substantially parallel to each other across the lower surface; and air cooling slots extending from the upper surface to the lower surface, the plurality of air cooling slots comprising a plurality of first slots and a plurality of second slots, the plurality of first slots having a smaller depth than the plurality of second slots, wherein one or more of the plurality of linear channels have different cross sectional shapes from the remaining linear channels of the plurality of channels.

14. An upper reflector plate for use in a process chamber, comprising:
an upper surface;
a lower surface;
a plurality of linear channels extending substantially parallel to each other across the lower surface, wherein each of the plurality of linear channels have one of a U-shaped cross section, a V-shaped cross section, an elliptical cross section, a parabolic cross section, or a rectangular cross section;
a plurality of air cooling slots extending from the upper surface to the lower surface, wherein the air cooling slots include a plurality of first slots and a plurality of second slots, wherein the plurality of first slots have a smaller depth than the plurality of second slots, wherein the plurality of first slots extend at an angle of less than 90 degrees with respect to the upper surface; and
a plurality of coolant channels formed in the upper surface.

Assignees

• Applied Materials Inc

Inventors

• Burrows Brian
• Lau Shu-Kwan Danny
• Ye Zhiyuan

Classifications

• H10P72/0436

  mainly by radiation · CPC title

• C23C16/52

  Controlling or regulating the coating process {(C23C16/45557, C23C16/279 take precedence)} · CPC title

• G02B7/182

  for mirrors · CPC title

• C30B25/08 Primary

  Reaction chambers; Selection of materials therefor · CPC title

• G02B7/181

  with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation · CPC title