Atomic layer deposition and etch in a single plasma chamber for critical dimension control
US-11211253-B2 · Dec 28, 2021 · US
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Brooks Mitchell patents
Brooks Mitchell is listed as an inventor on 8 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Brooks Mitchell |
| Total patents | 8 |
| First publication | May 23, 2019 |
| Latest publication | Dec 28, 2021 |
Notable patents
Publications ranked by popularity score, then publication date.
Atomic layer deposition and etch for reducing roughness
US-11170997-B2 · Nov 9, 2021 · US
Atomic layer deposition and etch in a single plasma chamber for critical dimension control
US-2020328087-A1 · Oct 15, 2020 · US
Atomic layer deposition and etch in a single plasma chamber for critical dimension control
US-10734238-B2 · Aug 4, 2020 · US
Atomic layer deposition and etch for reducing roughness
US-2020243326-A1 · Jul 30, 2020 · US
Atomic layer deposition and etch for reducing roughness
US-10658174-B2 · May 19, 2020 · US
Atomic layer deposition and etch for reducing roughness
US-2019157066-A1 · May 23, 2019 · US
Atomic layer deposition and etch in a single plasma chamber for critical dimension control
US-2019157095-A1 · May 23, 2019 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 8 |
| Lam Res Corportation | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P76/4085 | 8 |
| H10P14/69433 | 8 |
| H10P14/69215 | 8 |
| H10P14/6336 | 8 |
| H10P14/6339 | 8 |