EUV optical element having blister-resistant multilayer cap
US-11215736-B2 · Jan 4, 2022 · US
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Bowering Norbert patents
Bowering Norbert is listed as an inventor on 5 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Bowering Norbert |
| Total patents | 5 |
| First publication | Jul 12, 2016 |
| Latest publication | Jan 4, 2022 |
Notable patents
Publications ranked by popularity score, then publication date.
Target material supply apparatus for an extreme ultraviolet light source
US-9632418-B2 · Apr 25, 2017 · US
Euv optical element having blister-resistant multilayer cap
US-2016349412-A1 · Dec 1, 2016 · US
Target material supply apparatus for an extreme ultraviolet light source
US-2016274466-A1 · Sep 22, 2016 · US
Target material supply apparatus for an extreme ultraviolet light source
US-9392678-B2 · Jul 12, 2016 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asml Netherlands Bv | 5 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H05G2/002 | 3 |
| C23C14/185 | 3 |
| H05G2/006 | 3 |
| H05G2/008 | 3 |
| G03F7/70033 | 3 |