Undercoating coverage and resistance control for ESCS of substrate processing systems
US-12565701-B2 · Mar 3, 2026 · US
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Bi Feng patents
Bi Feng is listed as an inventor on 20 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Bi Feng |
| Total patents | 20 |
| First publication | Jan 21, 2016 |
| Latest publication | Mar 3, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Hydrogen reduction in amorphous carbon films
US-2025308885-A1 · Oct 2, 2025 · US
Undercoating coverage and resistance control for escs of substrate processing systems
US-2025101580-A1 · Mar 27, 2025 · US
Soaking and esc clamping sequence for high bow substrates
US-2025027198-A1 · Jan 23, 2025 · US
High temperature pedestal with extended electrostatic chuck electrode
US-2023369091-A1 · Nov 16, 2023 · US
Oxide interface displaying electronically controllable ferromagnetism
US-11688539-B2 · Jun 27, 2023 · US
Oxide interface displaying electronically controllable ferromagnetism
US-2022084731-A1 · Mar 17, 2022 · US
Oxide interface displaying electronically controllable ferromagnetism
US-11205535-B2 · Dec 21, 2021 · US
Showerhead with air-gapped plenums and overhead isolation gas distributor
US-10745806-B2 · Aug 18, 2020 · US
Cleaning process for removing boron-carbon residuals in processing chamber at high temperature
US-10679830-B2 · Jun 9, 2020 · US
Recent patents
Latest publications not already listed above.
Oxide interface displaying electronically controllable ferromagnetism
US-2020126705-A1 · Apr 23, 2020 · US
Showerhead with air-gapped plenums and overhead isolation gas distributor
US-2020063261-A1 · Feb 27, 2020 · US
Oxide interface displaying electronically controllable ferromagnetism
US-10490331-B2 · Nov 26, 2019 · US
Showerhead with air-gapped plenums and overhead isolation gas distributor
US-2019352777-A1 · Nov 21, 2019 · US
Showerhead with air-gapped plenums and overhead isolation gas distributor
US-10472716-B1 · Nov 12, 2019 · US
Oxide interface displaying electronically controllable ferromagnetism
US-2018075960-A1 · Mar 15, 2018 · US
Oxide interface displaying electronically controllable ferromagnetism
US-9852835-B2 · Dec 26, 2017 · US
Cleaning process for removing boron-carbon residuals in processing chamber at high temperature
US-2017365450-A1 · Dec 21, 2017 · US
Uniform wafer temperature achievement in unsymmetric chamber environment
US-2017178758-A1 · Jun 22, 2017 · US
Oxide interface displaying electronically controllable ferromagnetism
US-2016020382-A1 · Jan 21, 2016 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 9 |
| Univ Of Pittsburgh—Of The Commonwealth System Of Higher Education | 4 |
| Univ Pittsburgh Commonwealth Sys Higher Education | 4 |
| Applied Materials Inc | 3 |
| Univ Pittsburgh | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G11C11/161 | 8 |
| G11C11/1675 | 8 |
| H01F10/06 | 8 |
| G11C11/155 | 8 |
| H01F1/40 | 8 |