Microlithographic projection exposure apparatus
US-9535336-B2 · Jan 3, 2017 · US
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Benz Daniel patents
Benz Daniel is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Benz Daniel |
| Total patents | 2 |
| First publication | Dec 20, 2016 |
| Latest publication | Jan 3, 2017 |
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Recent patents
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70116 | 2 |
| G03F7/70891 | 2 |
| G03F7/70291 | 2 |
| H10P76/00 | 2 |
| G03F7/20 | 2 |