Field-to-field corrections using overlay targets
US-2021200105-A1 · Jul 1, 2021 · US
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Ben Dov Guy patents
Ben Dov Guy is listed as an inventor on 8 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Ben Dov Guy |
| Total patents | 8 |
| First publication | Jul 23, 2015 |
| Latest publication | Jul 1, 2021 |
Notable patents
Publications ranked by popularity score, then publication date.
Field-to-field corrections using overlay targets
US-10990022-B2 · Apr 27, 2021 · US
Field-to-Field Corrections Using Overlay Targets
US-2020201193-A1 · Jun 25, 2020 · US
Symmetric target design in scatterometry overlay metrology
US-10591406-B2 · Mar 17, 2020 · US
Pupil plane calibration for scatterometry overlay measurement
US-9909982-B2 · Mar 6, 2018 · US
Symmetric target design in scatterometry overlay metrology
US-9739702-B2 · Aug 22, 2017 · US
Symmetric target design in scatterometry overlay metrology
US-2016216197-A1 · Jul 28, 2016 · US
Symmetric target design in scatterometry overlay metrology
US-2015204664-A1 · Jul 23, 2015 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Kla Tencor Corp | 5 |
| Kla Corp | 3 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70633 | 8 |
| G01N21/9501 | 7 |
| G03F7/70683 | 7 |
| G01N2201/068 | 4 |
| G01N21/956 | 4 |