Heat treatment apparatus and heat treatment method
US-11114319-B2 · Sep 7, 2021 · US
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Baba Norio patents
Baba Norio is listed as an inventor on 5 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Baba Norio |
| Total patents | 5 |
| First publication | Jul 30, 2015 |
| Latest publication | Sep 7, 2021 |
Notable patents
Publications ranked by popularity score, then publication date.
Heat treatment apparatus and heat treatment method
US-2020168486-A1 · May 28, 2020 · US
Clamp apparatus, substrate carry-in/out apparatus using the same, and substrate processing apparatus
US-9857124-B2 · Jan 2, 2018 · US
Clamp apparatus, substrate carry-in/out apparatus using the same, and substrate processing apparatus
US-2016273836-A1 · Sep 22, 2016 · US
Substrate heat treatment apparatus, method of installing substrate heat treatment apparatus
US-2015214080-A1 · Jul 30, 2015 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Tokyo Electron Ltd | 5 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01L21/67109 | 5 |
| H10P72/0434 | 4 |
| H10P72/3406 | 4 |
| H10P72/3218 | 3 |
| H10P95/90 | 3 |