Euv mask inspection apparatus and method through illumination control
US-2025334514-A1 · Oct 30, 2025 · US
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Ahn Jinho patents
Ahn Jinho is listed as an inventor on 16 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Ahn Jinho |
| Total patents | 16 |
| First publication | Nov 19, 2015 |
| Latest publication | Oct 30, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Device and method for measuring refraction coefficient and extinction coefficient of euv mask material
US-2025321186-A1 · Oct 16, 2025 · US
Comprehensive inspection equipment for euv exposure process
US-2025231494-A1 · Jul 17, 2025 · US
Pellicle cleaning apparatus and pellicle cleaning method using the same
US-12032281-B2 · Jul 9, 2024 · US
Mask protective module, pellicle having the same, and lithography apparatus having the same
US-11940726-B2 · Mar 26, 2024 · US
Multi-layered molecular film photoresist having molecular line structure and method for manufacturing same
US-2024061330-A1 · Feb 22, 2024 · US
Pellicle cleaning apparatus and pellicle cleaning method using the same
US-2023205078-A1 · Jun 29, 2023 · US
Mask protective module, pellicle having the same, and lithography apparatus having the same
US-2022334467-A1 · Oct 20, 2022 · US
Mask protective module, pellicle having the same, and lithography apparatus having the same
US-11402746-B2 · Aug 2, 2022 · US
Mask for extreme ultraviolet lithography and method for manufacturing same
US-2021397078-A1 · Dec 23, 2021 · US
Recent patents
Latest publications not already listed above.
Mask protective module, pellicle having the same, and lithography apparatus having the same
US-2019204732-A1 · Jul 4, 2019 · US
Mask for extreme ultraviolet lithography process and method of fabricating the same
US-10061190-B2 · Aug 28, 2018 · US
Pellicle for EUV lithography
US-9958770-B2 · May 1, 2018 · US
Pellicle for euv lithography
US-2017038675-A1 · Feb 9, 2017 · US
Microorganism having novel acrylic acid synthesis pathway and method of producing acrylic acid by using the microorganism
US-9506089-B2 · Nov 29, 2016 · US
Microorganism having novel acrylic acid synthesis pathway and method of producing acrylic acid by using the microorganism
US-2015329881-A1 · Nov 19, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Iucf Hyu | 6 |
| Univ Hanyang Ind Univ Coop Found | 5 |
| Samsung Electronics Co Ltd | 4 |
| Iucf Hyu Erica Campus | 1 |
| Industry Univ Cooperation Foundation Hanyang Univ Iucf Hyu | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F1/62 | 9 |
| H10P76/00 | 6 |
| G03F7/20 | 6 |
| G03F1/84 | 4 |
| G03F7/70983 | 4 |