Substrate processing method and substrate processing apparatus
US-12020943-B2 · Jun 25, 2024 · US
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Patent family 83284076
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 83284076 |
| Family type | — |
| Earliest priority | Mar 17, 2021 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US12020943B2 — Substrate processing method and substrate processing apparatus |
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US12020943B2 — Substrate processing method and substrate processing apparatus (published Jun 25, 2024)
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Substrate processing method and substrate processing apparatus
US-2022301880-A1 · Sep 22, 2022 · US