Apparatus for processing a plurality of substrates provided with an extractor chamber
US-2025389485-A1 · Dec 25, 2025 · US
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Patent family 82547538
This patent family groups 3 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 82547538 |
| Family type | — |
| Earliest priority | Jul 6, 2021 |
| First filing country | US |
| Member publications | 3 |
| Countries | US |
| Representative publication | US2025389485A1 — Apparatus for processing a plurality of substrates provided with an extractor chamber |
Representative publication
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US2025389485A1 — Apparatus for processing a plurality of substrates provided with an extractor chamber (published Dec 25, 2025)
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