Substrate treating apparatus and substrate support unit
US-2025166977-A1 · May 22, 2025 · US
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Patent family 80115249
This patent family groups 3 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 80115249 |
| Family type | — |
| Earliest priority | Aug 7, 2020 |
| First filing country | US |
| Member publications | 3 |
| Countries | US |
| Representative publication | US2025166977A1 — Substrate treating apparatus and substrate support unit |
Representative publication
Best representative member for this family based on priority and filing country.
US2025166977A1 — Substrate treating apparatus and substrate support unit (published May 22, 2025)
Member publications
Related publications in this family.
Substrate treating apparatus and substrate support unit
US-12249491-B2 · Mar 11, 2025 · US
Substrate treating apparatus and substrate support unit
US-2022044917-A1 · Feb 10, 2022 · US