Injector configured for arrangement within a reaction chamber of a substrate processing apparatus
US-2026035794-A1 · Feb 5, 2026 · US
This patent family groups 5 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 78806372 |
| Family type | — |
| Earliest priority | Nov 30, 2020 |
| First filing country | US |
| Member publications | 5 |
| Countries | US |
| Representative publication | US2026035794A1 — Injector configured for arrangement within a reaction chamber of a substrate processing apparatus |
Best representative member for this family based on priority and filing country.
US2026035794A1 — Injector configured for arrangement within a reaction chamber of a substrate processing apparatus (published Feb 5, 2026)
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