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Patent family 67904182

This patent family groups 4 related publications across US. Members often share priority claims or equivalent filings in different countries.

Patent family metadata
Field	Value
Family ID	67904182
Family type	—
Earliest priority	Mar 15, 2018
First filing country	US
Member publications	4
Countries	US
Representative publication	US11600776B2 — Apparatus for and method of fabricating semiconductor device

Representative publication

Best representative member for this family based on priority and filing country.

US11600776B2 — Apparatus for and method of fabricating semiconductor device (published Mar 7, 2023)

Related publications in this family.