Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation device

Patent metadata

Field	Value
Publication number	US-2022190547-A1
Application number	US-202117555901-A
Country	US
Kind code	A1
Filing date	Dec 20, 2021
Priority date	May 26, 2016
Publication date	Jun 16, 2022
Grant date	—

Abstract

A pulsed light generation device, includes: a first optical fiber through which first pulsed light and second pulsed light, having an intensity that decreases while an intensity of the first pulsed light increases, and increases while the intensity of the first pulsed light decreases, having been multiplexed and entered therein, are propagated; and a second optical fiber at which the first pulsed light, having exited the first optical fiber and entered therein, is amplified while being propagated therein, wherein: at the first optical fiber, phase modulation occurs in the first pulsed light due to cross phase modulation caused by the second pulsed light; and self-phase modulation occurring in the first pulsed light at the second optical fiber is diminished by the phase modulation having occurred at the first optical fiber.

First claim

What is claimed is:

1 . A light amplification device, comprising:
a first optical fiber to receive first pulsed light and second pulsed light, the second pulsed light having a peak intensity greater than a peak intensity of the first pulsed light; and a second optical fiber to receive the first pulsed light from the first optical fiber and to amplify the first pulsed light, wherein nonlinearity of the first optical fiber is greater than nonlinearity of the second optical fiber, and a length of the first optical fiber is longer than a length of the second optical fiber.

2 . A light amplification device, comprising:
a first optical fiber to receive first pulsed light and second pulsed light, the second pulsed light having a peak intensity greater than a peak intensity of the first pulsed light; and a second optical fiber to receive the first pulsed light from the first optical fiber and to amplify the first pulsed light, wherein a mode field diameter of the first optical fiber is smaller than a mode field diameter of the second optical fiber, and a length of the first optical fiber is longer than a length of the second optical fiber.

Assignees

• Nikon Corp

Inventors

• Tokuhisa Akira

Classifications

• G01N21/956

  Inspecting patterns on the surface of objects {(contactless testing of electronic circuits G01R31/308; testing currency G07D; manufacturing processes per se of semiconductor devices implementing a measuring step H10P74/20)} · CPC title

• H01S5/4087

  emitting more than one wavelength · CPC title

• G02F1/3532 Primary

  Arrangements of plural nonlinear devices for generating multi-colour light beams, e.g. arrangements of SHG, SFG, OPO devices for generating RGB light beams · CPC title

• H01S5/4012

  Beam combining, e.g. by the use of fibres, gratings, polarisers, prisms · CPC title

• H01S5/0092

  for nonlinear frequency conversion, e.g. second harmonic generation [SHG] or sum- or difference-frequency generation outside the laser cavity · CPC title