Film forming method for metal film and film forming apparatus therefor
US-10760172-B2 · Sep 1, 2020 · US
This patent family groups 4 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 58715075 |
| Family type | — |
| Earliest priority | May 23, 2016 |
| First filing country | US |
| Member publications | 4 |
| Countries | US |
| Representative publication | US10760172B2 — Film forming method for metal film and film forming apparatus therefor |
Best representative member for this family based on priority and filing country.
US10760172B2 — Film forming method for metal film and film forming apparatus therefor (published Sep 1, 2020)
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